A Practical OEM Checklist for Specifying a Mica Heating Plate
https://heater-technology-guide.northstarcolumn.com/posts/kapton-heater-basics-what-engineers-should-know-before-selection
In semiconductor support equipment, a mica heating plate must deliver heat in a controlled way. It uses a mica-insulated resistive heater built for plate-style heat transfer. One useful trait is custom plate geometry